An Introduction to Microelectromechanical Systems Engineering
Language: English
Published by Artech House Publishers, 2000
- Hardcover
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- Title
- An Introduction to Microelectromechanical Systems Engineering
- Author
- Nadim Maluf
- Publisher
- Artech House Publishers
- Publication year
- 2000
- Condition
- Good
- Binding
- hardcover
- Language
- English
- ISBN 10
- 0890065810
- ISBN 13
- 9780890065815
- Edition
- 2nd Edition
A non-technical introduction to the field of microelectromechanical systems (MEMS). It describes in detail the materials used in producing MEMS - including silicon, polymers and glass and quartz substrates - as well as MEMS design for nozzles, sensors, valves and other applications. It examines the manufacture of commercial MEMS using technologies such as oxidation, lithography, chemical vapour deposition and silicon fusion bonding and applications in a wide range of industries including data storage, telecommunications, consumer, automotive, medical and defence. The book also addresses the future of MEMS - its potential for microelectrode arrays, actuators and optical switches and other technologies.
"Synopsis" may belong to another edition of this title.
About the Author
Nadim Maluf is head of research and development at NovaSensor in Fremont, California, and is Consulting Professor of Electrical Engineering at Stanford University.
"About the title" may belong to another edition of this title.
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