An Introduction to Microelectromechanical Systems Engineering

Nadim Maluf

ISBN 10: 0890065810 / ISBN 13: 9780890065815

Published by Artech House Publishers, 2000

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Bibliographic Details

• Title: An Introduction to Microelectromechanical Systems Engineering
• Publisher: Artech House Publishers
• Publication Date: 2000
• Language: English
• ISBN 10: 0890065810
• ISBN 13: 9780890065815
• Binding: Hardcover
• Edition: 2nd Edition
• Condition: new

About this title

Synopsis

A non-technical introduction to the field of microelectromechanical systems (MEMS). It describes in detail the materials used in producing MEMS - including silicon, polymers and glass and quartz substrates - as well as MEMS design for nozzles, sensors, valves and other applications. It examines the manufacture of commercial MEMS using technologies such as oxidation, lithography, chemical vapour deposition and silicon fusion bonding and applications in a wide range of industries including data storage, telecommunications, consumer, automotive, medical and defence. The book also addresses the future of MEMS - its potential for microelectrode arrays, actuators and optical switches and other technologies.

About the Author

Nadim Maluf is head of research and development at NovaSensor in Fremont, California, and is Consulting Professor of Electrical Engineering at Stanford University.