An Introduction to Microelectromechanical Systems Engineering

Nadim Maluf

ISBN 10: 0890065810 ISBN 13: 9780890065815

Published by Artech House Publishers, 1999

Language: English

Condition: New Hardcover

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Bibliographic Details

Title

An Introduction to Microelectromechanical Systems Engineering

Publisher

Artech House Publishers

Publication Date

1999

Language

English

ISBN 10

0890065810

ISBN 13

9780890065815

Binding

Buch

Edition

2nd Edition

Condition

Neu

Dimensions

Weight

644 grams

Seller catalogs

B�cher

About this title

Synopsis

A non-technical introduction to the field of microelectromechanical systems (MEMS). It describes in detail the materials used in producing MEMS - including silicon, polymers and glass and quartz substrates - as well as MEMS design for nozzles, sensors, valves and other applications. It examines the manufacture of commercial MEMS using technologies such as oxidation, lithography, chemical vapour deposition and silicon fusion bonding and applications in a wide range of industries including data storage, telecommunications, consumer, automotive, medical and defence. The book also addresses the future of MEMS - its potential for microelectrode arrays, actuators and optical switches and other technologies.

About the Author

Nadim Maluf is head of research and development at NovaSensor in Fremont, California, and is Consulting Professor of Electrical Engineering at Stanford University.

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