A non-technical introduction to the field of microelectromechanical systems (MEMS). It describes in detail the materials used in producing MEMS - including silicon, polymers and glass and quartz substrates - as well as MEMS design for nozzles, sensors, valves and other applications. It examines the manufacture of commercial MEMS using technologies such as oxidation, lithography, chemical vapour deposition and silicon fusion bonding and applications in a wide range of industries including data storage, telecommunications, consumer, automotive, medical and defence. The book also addresses the future of MEMS - its potential for microelectrode arrays, actuators and optical switches and other technologies.

About the Author

Nadim Maluf is head of research and development at NovaSensor in Fremont, California, and is Consulting Professor of Electrical Engineering at Stanford University.

"About this title" may belong to another edition of this title.

Store Description

Visit Seller's Storefront

Seller's business information

SHIMEDIA
NY, U.S.A.

Sale & Shipping Terms

Terms of Sale

Shipping Terms

Shipping rates within U.S.A.

Shipping rates within U.S.A.
Order quantity	5 to 14 business days	5 to 14 business days
First item	US$ 0.00	US$ 14.00

Delivery times are set by sellers and vary by carrier and location. Orders passing through Customs may face delays and buyers are responsible for any associated duties or fees. Sellers may contact you regarding additional charges to cover any increased costs to ship your items.