Befriedigend/Good: Durchschnittlich erhaltenes Buch bzw. Schutzumschlag mit Gebrauchsspuren, aber vollst�ndigen Seiten. / Describes the average WORN book or dust jacket that has all the pages present.

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Bibliographic Details

Title: Introduction to Microlithography (Acs Professional Reference Books)
Publisher: Amer Chemical Society
Publication Date: 1994
Language: English
ISBN 10: 0841228485
ISBN 13: 9780841228481
Binding: Hardcover
Condition: good

About this title

Synopsis

Updated and expanded! Reviews the theory, materials, and processes that are used in the lithographic process. Opens with a brief historical introduction to the advances in microlithography. Discusses four major topics: the physics of the lithographic process, organic resist materials, resist processing, and plasma etching. Designed as a tutorial for researchers with no experience in the field, as well as those experienced in microlithography. Will also prove invaluable to those already involved in microlithography. Includes numerous references for more detailed reading on specific aspects of microlithography.

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