This up-to-date reference on semiconductor manufacturing processes takes into consideration the rapid development of the industry's technology. It thoroughly describes the complicated and new IC chip fabrication processes in detail—with minimum mathematics, physics, and chemistry. Advanced technologies are covered along with older ones to provide an understanding of the development processes from a historic point of view. The coverage in this book will help users 1)learn more about their job-related knowledge, 2)improve troubleshooting and problem-solving skills, and 3)raise their career development potentials. This coverage includes semiconductor basics; wafer manufacturing; thermal processes; photolithography; plasma basics; ion implantation; etch; CVD and dielectric thin film; metallization; CMP; process integration; and CMOS processes. For operators, technicians, engineers, and personnel of sales, marketing, administration and management who are working in the semiconductor industry and semiconductor related industries. s.
This book is written for technology students taking their first course in semiconductor manufacturing. It contains comprehensive and up-to-date information on this fast-changing industry. The text provides excellent descriptions of semiconductors, advanced manufacturing technologies, and plasma in integrated circuit (IC) processes. It focuses on the newest IC fabrication technologies and also describes older technologies to help the reader understand the development from an historical perspective. The material covered in the text is very close to real fabrication situations.