An Introduction to Semiconductor Microtechnology

An Introduction to Semiconductor Microtechnology Second Edition D. V. Morgan School of Electrical, Electronic and Systems Engineering, University of Wales, College of Cardiff, Wales K. Board Department of Electrical Engineering, University of Wales, Swansea, Wales ‘The book is warmly recommended’ From a review of the first edition, Physics Bulletin The first edition of this book provided a comprehensive introduction to the various processes and materials used to fabricate devices in silicon and gallium arsenide. The new edition remains highly accessible to those with no prior specialist knowledge of the subject, and is the only textbook devoted exclusively to microelectronic fabrication at an introductory level. In this second edition, the authors have brought the book right up to date, and have added instructional objectives, self-evaluation questions, and problems to each chapter. Amongst others, there are new sections on polysilicon and heterojunctions. The book will appeal to a wide range of readers—in particular students of electronic engineering, computer science, physics and materials science.