Introduction To Semiconductor Microtechnology (paper Only) (open University Title)

This introduction to semiconductor microtechnology covers the structure and manufacture of semiconductor devices. The Second Edition has been updated to reflect advances in the design and fabrication of semiconductor devices. Provides background material on semiconductor microtechnology and describes the properties of semiconductor materials and each step of the manufacturing process. Includes more photographs and larger diagrams; also provides instructional objectives and self-evaluation questions at the beginning of each chapter and problems at the end.