Integrated circuits are finding wider applications through a range of industries. This title presents the design principles for devices, describes the overall VLSI process, and deals with the useful manufacturing technologies and inspection procedures. Editor(s): Naka, Y.; Sugawara, K.; McGreavy, C. Num Pages: 210 pages, biography. BIC Classification: TD; UY. Category: (P) Professional & Vocational; (UP) Postgraduate, Research & Scholarly; (UU) Undergraduate. Dimension: 234 x 156 x 14. Weight in Grams: 498. . 1993. Hardback. . . . .

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Bibliographic Details

Title: Introduction to VLSI Process Engineering
Publisher: Chapman and Hall
Publication Date: 1993
Language: English
ISBN 10: 0412395509
ISBN 13: 9780412395505
Binding: Hardcover
Condition: New

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Synopsis

Integrated circuits are finding ever wider applications through a range of industries. Introduction to VLSI Process Engineering presents the design principles for devices, describes the overall VLSI process, and deals with the essential manufacturing technologies and inspection procedures.

Language Notes

Text: English (translation)
Original Language: Japanese

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