Investigation Of AlN Films And Creating Devices Based On Them

Rinat Khanbekov

ISBN 10: 3659708216 / ISBN 13: 9783659708213

Published by LAP LAMBERT Academic Publishing Mai 2015, 2015

About this Item

Neuware -Progress of the modern means of communication, which mostly involves the increase of operating frequency of devices, dictates the necessity of implementing new materials that would allow to access higher frequencies in the microwave band. A number of exceptional characteristics make aluminum nitride a quite perspective material for a great variety of implementations, especially for creating acoustoelectronic devices. The goals of the present work were studying the processes of acquiring the aluminum nitride thin films using RF magnetron sputtering technique and investigating the possibilities of applying these films to create acoustoeletronic devices working on microwave and extremely high frequencies.Books on Demand GmbH, Überseering 33, 22297 Hamburg 64 pp. Englisch.

Seller Inventory # 9783659708213

Bibliographic Details

• Title: Investigation Of AlN Films And Creating Devices Based On Them
• Publisher: LAP LAMBERT Academic Publishing Mai 2015
• Publication Date: 2015
• Language: English
• ISBN 10: 3659708216
• ISBN 13: 9783659708213
• Binding: Taschenbuch
• Condition: Neu

About this title

Synopsis

Progress of the modern means of communication, which mostly involves the increase of operating frequency of devices, dictates the necessity of implementing new materials that would allow to access higher frequencies in the microwave band. A number of exceptional characteristics make aluminum nitride a quite perspective material for a great variety of implementations, especially for creating acoustoelectronic devices. The goals of the present work were studying the processes of acquiring the aluminum nitride thin films using RF magnetron sputtering technique and investigating the possibilities of applying these films to create acoustoeletronic devices working on microwave and extremely high frequencies.

About the Author

Rinat Naimovich Khanbekov, graduate of the Solid State Physics Department of Saratov State University. Worked in the Metamaterials laboratory of SSU, Saratov.