Laser processing of biocompatible polymers for development of mems

Medical grade PDMS elastomer is a widely used biomaterial in medicine and for production of high-tech devices - MEMS and NEMS. Results on experimental study of the PDMS-elastomer processing by fs-, ps- and ns-lasers, working in UV, VIS and NIR regions of the spectra are presented. Different processing parameters as pulse duration, fluency, scanning speed, and overlapping of the subsequent pulses are varied in order to activate and change the surface morphology. High definition trenches are produced. Analyses by 3D Color Laser and Optical Microscope, XRD, SEM, XPS, and μ-Raman are accomplished in order to get information about the structural morphology and alteration of the chemical composition of the ablated traces. Optical properties of the processed material are specially studied and evaluated. Finally, attempts for successful metallization by Pt or Ni via electro less plating of the trenches produced are accomplished. The metallization process is not sensitive to the time interval after the laser treatment. The results are very promising and confirm the expectation to use such a laser-based technology and metallization for micro- or nano-fabrication of hi-tech devices.