Low-Temperature Silicon Sputter-Deposition Epitaxy for 3-D Integrated Circuits: A Thesis Submitted to the Faculty of the Graduate School of the University of Minnesota

Wang, Pailu Dennis

Publication Date: 1987

About this Item

Hardcover; no dustjacket, as issued. This is a printed PHD thesis published at the University of Minnesota in 1987. Bound in black buckram. The binding is clean. Page edges a bit age-toned. Else pages clean. B&W illustrations. ; 27D; 11" x 8-1/2"; 141 pages.

Seller Inventory # 62750

Bibliographic Details

• Title: Low-Temperature Silicon Sputter-Deposition Epitaxy for 3-D Integrated Circuits: A Thesis Submitted to the Faculty of the Graduate School of the University of Minnesota
• Publication Date: 1987
• Binding: Hardcover
• Condition: Very Good+
• Dust Jacket Condition: No Dust Jacket