MATERIALS, PROCESSES, AND RELIABILITY FOR ADVANCED INTERCONNECTS FOR MICRO- AND NANOELECTRONICS Â " 2011
MIKHAIL R. BAKLANOV, IMECGERAUD DUBOIS, IBM ALMADEN RESEARCH CENTERCHRISTIAN DUSSARRAT, AIR LIQUIDETERUKAZU KOKUBO, NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGYSHINICHI OGAWA, JSR TSUKUBA RESEARCH LABORATORIES DIV CLASS="CONTRIBUTORSPEOPLE">DIV CLASS="CONTRIBUTORSPEOPLEHIDDEN">MARIANNA PANTOUVAKI, ANTHONY GRUNENWALD, SHOKO ONO, HEE-WOO RHEE, JOHN H. ZHANG, QUOC TOAN LE, SVEN ZIMMERMANN, VALERI AFANAS'EV, NAN LU, WIM BOGAERTS, SHAONING YAO, NEDA DALILI, JON GUDMUNDSSON, PATRIC
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