MATERIALS, PROCESSES, AND RELIABILITY FOR ADVANCED INTERCONNECTS FOR MICRO- AND NANOELECTRONICS " 2011

MIKHAIL R. BAKLANOV, IMECGERAUD DUBOIS, IBM ALMADEN RESEARCH CENTERCHRISTIAN DUSSARRAT, AIR LIQUIDETERUKAZU KOKUBO, NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGYSHINICHI OGAWA, JSR TSUKUBA RESEARCH LABORATORIES DIV CLASS="CONTRIBUTORSPEOPLE">DIV CLASS="CONTRIBUTORSPEOPLEHIDDEN">MARIANNA PANTOUVAKI, ANTHONY GRUNENWALD, SHOKO ONO, HEE-WOO RHEE, JOHN H. ZHANG, QUOC TOAN LE, SVEN ZIMMERMANN, VALERI AFANAS'EV, NAN LU, WIM BOGAERTS, SHAONING YAO, NEDA DALILI, JON GUDMUNDSSON, PATRIC

Language: English

Published by Materials Research Society, 2011

1605113123 / 9781605113128

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Title
MATERIALS, PROCESSES, AND RELIABILITY FOR ADVANCED INTERCONNECTS FOR MICRO- AND NANOELECTRONICS " 2011
Author
MIKHAIL R. BAKLANOV, IMECGERAUD DUBOIS, IBM ALMADEN RESEARCH CENTERCHRISTIAN DUSSARRAT, AIR LIQUIDETERUKAZU KOKUBO, NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGYSHINICHI OGAWA, JSR TSUKUBA RESEARCH LABORATORIES DIV CLASS="CONTRIBUTORSPEOPLE">DIV CLASS="CONTRIBUTORSPEOPLEHIDDEN">MARIANNA PANTOUVAKI, ANTHONY GRUNENWALD, SHOKO ONO, HEE-WOO RHEE, JOHN H. ZHANG, QUOC TOAN LE, SVEN ZIMMERMANN, VALERI AFANAS'EV, NAN LU, WIM BOGAERTS, SHAONING YAO, NEDA DALILI, JON GUDMUNDSSON, PATRIC
Publisher
Materials Research Society
Publication year
2011
Condition
Brand New
Binding
Hardcover
Language
English
ISBN 10
1605113123
ISBN 13
9781605113128

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