MECHANICAL BEHAVIOR OF MATERIALS AND STRUCTURES IN MICROELECTRONICS
EPHRAIM SUHIR, AT&T BELL LABORATORIES, NEW JERSEYROBERT C. CAMMARATA, THE JOHNS HOPKINS UNIVERSITYDEBORAH D. L. CHUNG, STATE UNIVERSITY OF NEW YORK, BUFFALOMASAHIRO JONO, OSAKA CITY UNIVERSITY, JAPAN DIV CLASS="CONTRIBUTORSPEOPLE">DIV CLASS="CONTRIBUTORSPEOPLEHIDDEN">SEMYON VAYNAN, MORRIS E. FINE, J. K. TIEN, A. I. ATTARWALA, YI-HSIN PAO, KUAN-LUEN CHEN, AN-YU KUO, CYNTHIA M. MELTON, SUSAN M. YARLING, CARL J. RALEIGH, WANG CHUNQING, QIAN YIYU, JIANG YIHONG, TOMOHIRO UNO, K. TATSUMI, K. MIZUNO, O
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