Language:Chinese.Pub Date: 2014-03-01 Publisher: Southeast University Press. micro-electromechanical systems (MEMS) technology is a rapidly developing field of cutting-edge technology. materials used many kinds of process for complex. requiring the system to summarize. analyze and sort order readers inspection. This manual is a large professional tool to access the main. The book includes material like MEMS. MEMS processing technology and manufacturing processes. MEMS process integration meth.

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Bibliographic Details

Title: MEMS Materials and Processes Handbook(Chinese Edition)
Publisher: Southeast University Press
Publication Date: 2014
Language: Chinese
ISBN 10: 7564140534
ISBN 13: 9787564140533
Binding: paperback
Condition: New

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Language:Chinese.SoftCover.Pub Date:2014-03-01.publisher:Southeast University Press.description:Pub Date: 2014-03-01 Publisher: Southeast University Press. micro-electromechanical systems (MEMS) technology is a rapidly developing field of cutting-edge technology. materials used many kinds of process for complex. requiring the system to summariz

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