MEMS and Microsystems

Tai-Ran Hsu

ISBN 10: 0470083018 / ISBN 13: 9780470083017

Published by John Wiley and Sons Ltd, 2008

About this Item

Technology/Engineering/Mechanical A bestselling MEMS text. now better than ever. An engineering design approach to Microelectromechanical Systems, MEMS and Microsystems remains the only available text to cover both the electrical and the mechanical aspects of the technology. Num Pages: 576 pages, Illustrations. BIC Classification: TBN; TJ. Category: (P) Professional & Vocational. Dimension: 242 x 200 x 35. Weight in Grams: 1128. . 2008. 2nd Edition. Hardcover. . . . .

Seller Inventory # V9780470083017

Bibliographic Details

• Title: MEMS and Microsystems
• Publisher: John Wiley and Sons Ltd
• Publication Date: 2008
• Language: English
• ISBN 10: 0470083018
• ISBN 13: 9780470083017
• Binding: Hardcover
• Edition: 2nd Edition
• Condition: New

About this title

Synopsis

Technology/Engineering/Mechanical

A bestselling MEMS text...now better than ever.

An engineering design approach to Microelectromechanical Systems, MEMS and Microsystems remains the only available text to cover both the electrical and the mechanical aspects of the technology. In the five years since the publication of the first edition, there have been significant changes in the science and technology of miniaturization, including microsystems technology and nanotechnology. In response to the increasing needs of engineers to acquire basic knowledge and experience in these areas, this popular text has been carefully updated, including an entirely new section on the introduction of nanoscale engineering.

Following a brief introduction to the history and evolution of nanotechnology, the author covers the fundamentals in the engineering design of nanostructures, including fabrication techniques for producing nanoproducts, engineering design principles in molecular dynamics, and fluid flows and heat transmission in nanoscale substances.

Other highlights of the Second Edition include:
*

Expanded coverage of microfabrication plus assembly and packaging technologies
*

The introduction of microgyroscopes, miniature microphones, and heat pipes
*

Design methodologies for thermally actuated multilayered device components
*

The use of popular SU-8 polymer material

Supported by numerous examples, case studies, and applied problems to facilitate understanding and real-world application, the Second Edition will be of significant value for both professionals and senior-level mechanical or electrical engineering students.

About the Author

Tai-Ran Hsu, PhD, is a Professor in the Department of Mechanical and Aerospace Engineering, San Jose State University, California. Dr. Hsu is the author of the earlier edition of this book, which is considered one of the bestselling textbooks on the subject of MEMS.