Title: Materials Aspects in Microsystem Technologies: Proceedings of Symposium H on Materials Aspects in Microsystem Technologies of the E-MRS 1998 Spring . Research Society Symposia Proceedings)
Publisher: Elsevier Science 1999-08-13
Publication Date: 1999
Language: English
ISBN 10: 0080436110
ISBN 13: 9780080436111
Binding: Hardcover
Condition: New

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Reprinted from: Sensors and actuators, v. 74, no. 1-3, 1999.

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