This volume includes selected papers based on the presentations given at Symposium O, “Materials, Processes, and Reliability for Advanced Interconnects for Micro- and Nanoelectronics,” held at the April 25-29, 2011 MRS Spring Meeting in San Francisco, California. The symposium included topics relating to low-k dielectrics, integration, reliability, metallization, packaging and emerging technologies.

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This volume includes selected papers based on the presentations given at Symposium O, "Materials, Processes, and Reliability for Advanced Interconnects for Micro- and Nanoelectronics," held at the April 25−29, 2011 MRS Spring Meeting in San Francisco, California.

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