The Materials Science of Microelectronics

Overview of the materials science and engineering that support the field of microelectronics, and discussions of advanced device concepts and characterization methods. DLC: Microelectronics Materials.

This book offers a concise account of the fundamental principles of solid state chemistry as they pertain to the understanding of applications to modern solid state electronics. Coverage addresses a broad range of critical topics. including the relationship among symmetry, chemical bonding, and bulk properties, VLSI and VHSIC technologies and solid state chemistry aspects of microelectronics, optical communications, integrated optics and photonics, and many others.