Materials Science in Microelectronics I: The Relationships Between Thin Film Processing and Structure

Eugene Machlin

ISBN 10: 008044640X / ISBN 13: 9780080446400

Published by ELSEVIER SCIENCE & TECHNOLOGY, 2005

About this Item

Zustand: Sehr gut | Seiten: 256 | Sprache: Englisch | Produktart: Bücher | Keine Beschreibung verfügbar.

Seller Inventory # 2231013/2

Bibliographic Details

• Title: Materials Science in Microelectronics I: The Relationships Between Thin Film Processing and Structure
• Publisher: ELSEVIER SCIENCE & TECHNOLOGY
• Publication Date: 2005
• Language: English
• ISBN 10: 008044640X
• ISBN 13: 9780080446400
• Binding: Hardcover
• Edition: 2nd Edition
• Condition: Sehr gut
• Seller catalogs:
  • Bücher

About this title

Synopsis

Thin films play a key role in the material science of microelectronics, and the subject matter of thin-films divides naturally into two headings: processing / structure relationship, and structure / properties relationship.The first volume of Materials Science in Microelectronics focuses on the first relationship – that between processing and the structure of the thin-film. The state of the thin film’s surface during the period that one monolayer exists - before being buried in the next layer – determines the ultimate structure of the thin film, and thus its properties. This volume takes into consideration the following potential influencing factors: crystal defects, void structure, grain structure, interface structure in epitaxial films, the structure of amorphous films, and reaction-induced structure.An ideal text or reference work for students and researchers in material science, who need to learn the basics of thin films.