Title: Materials, Technology and Reliability for Advanced Interconnects and LowK Dielectrics: Volume 612 (MRS Proceedings)
Publisher: Cambridge University Press
Publication Date: 2014
Language: English
ISBN 10: 110741315X
ISBN 13: 9781107413153
Binding: Soft cover
Condition: New

About this title

Synopsis

This book highlights important achievements and challenges in advanced interconnects and low-k dielectrics as employed in the microelectronics industry. The replacement of Al alloys with Cu along with the introduction of new barrier materials to protect Cu from chemical attack, and the utilization of new dielectric materials with a lower relative dielectric constant k than SiO2 in multilevel metallization structures of increasing complexity, are the major themes of evolution in this field. Invited reviews illustrate the significant progress that has been achieved as well as the challenges that remain. Contributed papers presented by researchers from different countries demonstrate progress on current topics using a truly multidisciplinary approach.

"About this title" may belong to another edition of this title.

Store Description

We carry a comprehensive range of out of print and rare books.

Visit Seller's Storefront

Seller's business information

Kennys Bookshops and Art Galleries Limited
Liosban Industrial Estate, Tuam Road, Galway, GY, Ireland

Sale & Shipping Terms

Terms of Sale

We guarantee the condition of every book as it's described on the Abebooks websites.

If you're dissatisfied with your purchase (Incorrect Book/Not as Described/Damaged) or if the order hasn't arrived, you're eligible for a refund within 30 days of the estimated delivery date.

For any queries please use the contact seller link or send an email to books@kennys.ie

Conor Kenny

Shipping Terms

All books securely packaged. Some books ship from Ireland.

Shipping rates within U.S.A.

Shipping rates within U.S.A.
Order quantity	14 to 20 business days	13 to 14 business days
First item	US$ 10.50	US$ 21.00

Delivery times are set by sellers and vary by carrier and location. Orders passing through Customs may face delays and buyers are responsible for any associated duties or fees. Sellers may contact you regarding additional charges to cover any increased costs to ship your items.