Micro Mechanical Systems

T. Fukuda

ISBN 10: 0444823638 / ISBN 13: 9780444823632

Published by Elsevier Science, 1998

About this Item

This item is printed on demand - it takes 3-4 days longer - Neuware -In ten sections this book describes the principles and technology of Micro Mechanical Systems. Section one is a general introduction to the historical background and the parallels to microelectronics, reviewing the motivation for microsystems, and discussing microphysics and design and the evolution from microcomponents to microsystems. Section two covers the areas of photolithographic microfabrication, basic concepts of planar processing, materials, and processes. Section three looks at micromachining by machine tools, its history, basic principles and preparation methods. Section four discusses tribological aspects of microsystems. Section five covers fabrication, performance and examples of silicon microsensors. Section six looks at electric and magnetic micro-actuators for micro-robots. Section seven covers energy source and power supply methods. Section eight covers controlling principles and methods of micro mechanical systems and section nine gives examples of microsystems and micromachines. The final section discusses the future problems and outlook of micro mechanical systems. Englisch.

Seller Inventory # 9780444823632

Bibliographic Details

• Title: Micro Mechanical Systems
• Publisher: Elsevier Science
• Publication Date: 1998
• Language: English
• ISBN 10: 0444823638
• ISBN 13: 9780444823632
• Binding: Buch
• Condition: Neu
• Dimensions: 244W x 168H x 16D millimeters 244 millimeters width by 168 millimeters height by 16 millimeters depth
• Weight: 660 grams

About this title

Synopsis

In ten sections this book describes the principles and technology of Micro Mechanical Systems. Section one is a general introduction to the historical background and the parallels to microelectronics, reviewing the motivation for microsystems, and discussing microphysics and design and the evolution from microcomponents to microsystems. Section two covers the areas of photolithographic microfabrication, basic concepts of planar processing, materials, and processes. Section three looks at micromachining by machine tools, its history, basic principles and preparation methods. Section four discusses tribological aspects of microsystems. Section five covers fabrication, performance and examples of silicon microsensors. Section six looks at electric and magnetic micro-actuators for micro-robots. Section seven covers energy source and power supply methods. Section eight covers controlling principles and methods of micro mechanical systems and section nine gives examples of microsystems and micromachines. The final section discusses the future problems and outlook of micro mechanical systems.