This text examines the technology behind the plethora of modern industrial and domestic technologies which incorporate micro-optics eg. CDs, cameras, automated manufacturing systems, mobile communications etc. It includes a simple but comprehensive introduction to micro-optical developments design, and an overview of fabrication and replication technology. The theoretical, practical and industrial developments in micro-scale optoelectronics continue apace in the late 1990s. In this book, a distinguished group of physicists and engineers describe the current state of research and applications in micro-optics. It provides the theoretical background and an overview of current technology, with several chapters taking a deeper look at specific recent applications and future trends. The book concentrates on diffractive and refractive micro- optical elements, such as lenses, fan-out gratings, optimized phase elements and polarisers. Sections are included on the simulation and optimization of design for micro-optics and subsequently the efficient transformation from design to real optical elements, using techniques such as e-beam writing, laser beam writing, lithography, etching and thin film deposition.

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H. P. Herzig

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