Microelectromechanical Systems - Materials and Devices: Volume 1052

. Ed(s): LaVan, David A.; Da Silva, Mark G.; Spearing, S. Mark; Vengallatore, Srikar

ISBN 10: 1558999906 / ISBN 13: 9781558999909

Published by Materials Research Society, 2008

About this Item

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners. Editor(s): LaVan, David A.; Da Silva, Mark G.; Spearing, S. Mark; Vengallatore, Srikar. Series: MRS Proceedings. Num Pages: 325 pages, Illustrations. BIC Classification: TGM; TJF. Category: (U) Tertiary Education (US: College). Dimension: 228 x 152 x 23. Weight in Grams: 577. . 2008. Hardback. . . . . Books ship from the US and Ireland.

Seller Inventory # V9781558999909

Bibliographic Details

• Title: Microelectromechanical Systems - Materials and Devices: Volume 1052
• Publisher: Materials Research Society
• Publication Date: 2008
• Language: English
• ISBN 10: 1558999906
• ISBN 13: 9781558999909
• Binding: Hardcover
• Condition: New

About this title

Synopsis

This book is part of a popular series on the materials science of MEMS devices. In the years since, many sophisticated devices have emerged and many aspects of MEMS materials behaviors have been characterized. However, there remain many basic questions about the relationship between process, properties and function for MEMS materials. Experimental methods have been developed, but there remains a lack of standardization that would allow comparison between laboratories and commercial vendors or the creation of materials specifications that would enable greater commercialization of MEMS. The book addresses many of these issues including: RF-MEMS; optical MEMS; MEMS metrology, tribology, materials characterization and mechanical behavior; MEMS surfaces, MEMS reliability, packaging and life assessment; MEMS modeling and software tools for materials integration; biocompatibility of MEMS materials and devices; new materials and fabrication methodologies for MEMS; microfluidics and nanofluidics; in vivo drug/gene/protein delivery; novel actuators; MEMS cell-based systems; MEMS neural interfaces; MEMS sensors; and MEMS microengines and microfuel cells.

Book Description

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners. This book covers the materials science of MEMS devices, including: RF-MEMS; optical MEMS; MEMS metrology, tribology, materials characterization and mechanical behavior; MEMS surfaces, MEMS reliability, packaging and life assessment; and MEMS modeling and software tools for materials integration.