Microelectronic Test Pattern NBS-3 for Evaluating the Resistivity - Dopant Density Relationship of Silicon. ( Seimiconductor Measurement Technology ).

Buehler, Martin G.

Published by NBS Special Publication 400-22, 1976, 49 Pp., 1976
Condition: Used - Very good Soft cover

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Used - Soft cover

Condition: Used - Very good

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