Title: Microlithography Fundamentals in Semiconductor Devices & Fabrication Technology
Publisher: Taylor & Francis Group
Publication Date: 1998
Language: English
ISBN 10: 0824799518
ISBN 13: 9780824799519
Binding: Hardcover
Condition: New

About this title

Synopsis

"Explores the science and technology of lithographic processes and resist materials and summarizes the most recent innovations in semiconductor manufacturing. Considers future trends in lithography and resist material technology. Reviews the interaction of light, electron beams, and X-rays with resist materials."

About the Author

Saburo Nonogaki, Ueno Takumi, Toshio Ito

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