Title: Micromachining and Microfabrication Process Technology V: 20-22 September 1999 Santa Clara, California (Proceedings of Spie, Volume 3874)
Publisher: Society of Photo Optical 0
Publication Date: 1999
Language: English
ISBN 10: 081943471X
ISBN 13: 9780819434715
Binding: paperback
Condition: Good
Dust Jacket Condition: Dust Jacket Included
Book Type: book

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A selection of 45 papers on the process technology of microfabrication and micromachining.

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