Modeling Methods for CMOS MEMS Speaker | using Finite Element Method

David Tumpold

ISBN 10: 3639467191 ISBN 13: 9783639467192

Published by AV Akademikerverlag, 2015

Language: English

Condition: New Soft cover

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Bibliographic Details

Title

Modeling Methods for CMOS MEMS Speaker | using Finite Element Method

Publisher

AV Akademikerverlag

Publication Date

2015

Language

English

ISBN 10

3639467191

ISBN 13

9783639467192

Binding

Taschenbuch

Condition

Neu

Dimensions

Weight

197 grams

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B�cher

About this title

Synopsis

This thesis deals with methods and fundamentals to describe and model a micro electro-mechanical system. The system used is an inversely driven silicone microphone based on capacitive transducer technique. The inversely driven microphone acts like an electrostatic loudspeaker, which has to be interconnected in an array, because of its small area. With this array arrangement digital sound reconstruction and higher sound pressure levels can be realized. The electrostatic force and mechanical membrane deformation are modeled with the finite element method. Acoustic wave propagation is computed on the one hand with the finite element method and on the other hand with the Kirchhoff-Helmholtz integral. This ansatz represents an alternative computation method for open domain problems in acoustics.

About the Author

2006-2010 Lab and prototype engineer at KAI GmbH, Villach; 2010-2012 Research assistance in applied mechatronic at Alps Adriatic University Klagenfurt ; 2013 Project assistance at Vienna University of Technology; 2005-2009 Master: Carinthian University of Applied Sciences; 2010-2011 Master: Alps Adriatic University Klagenfurt; 2013: PhD TU Vienna

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