Nanofabrication

Steven Dew

ISBN 10: 370911666X / ISBN 13: 9783709116661

Published by Springer Vienna Jan 2014, 2014

About this Item

This item is printed on demand - it takes 3-4 days longer - Neuware -Intended to update scientists and engineers on the current state of the art in a variety of key techniques used extensively in the fabrication of structures at the nanoscale. The present work covers the essential technologies for creating sub 25 nm features lithographically, depositing layers with nanometer control, and etching patterns and structures at the nanoscale. A distinguishing feature of this book is a focus not on extension of microelectronics fabrication, but rather on techniques applicable for building NEMS, biosensors, nanomaterials, photonic crystals, and other novel devices and structures that will revolutionize society in the coming years. 352 pp. Englisch.

Seller Inventory # 9783709116661

Bibliographic Details

• Title: Nanofabrication
• Publisher: Springer Vienna Jan 2014
• Publication Date: 2014
• Language: English
• ISBN 10: 370911666X
• ISBN 13: 9783709116661
• Binding: Taschenbuch
• Condition: Neu
• Dimensions: 235W x 155H x 20D millimeters 235 millimeters width by 155 millimeters height by 20 millimeters depth
• Weight: 534 grams

About this title

Synopsis

Intended to update scientists and engineers on the current state of the art in a variety of key techniques used extensively in the fabrication of structures at the nanoscale. The present work covers the essential technologies for creating sub 25 nm features lithographically, depositing layers with nanometer control, and etching patterns and structures at the nanoscale. A distinguishing feature of this book is a focus not on extension of microelectronics fabrication, but rather on techniques applicable for building NEMS, biosensors, nanomaterials, photonic crystals, and other novel devices and structures that will revolutionize society in the coming years.