Nanofabrication (eng)
Stepanova, Maria
Sold by Brook Bookstore On Demand, Napoli, NA, Italy
AbeBooks Seller since October 11, 2022
New - Hardcover
Condition: New
Ships from Italy to U.S.A.
Quantity: Over 20 available
Add to basketSold by Brook Bookstore On Demand, Napoli, NA, Italy
AbeBooks Seller since October 11, 2022
Condition: New
Quantity: Over 20 available
Add to basketQuesto è un articolo print on demand.
Seller Inventory # e2c18364af0ee4f80c2ccb8fd3fad2ff
Intended to update scientists and engineers on the current state of the art in a variety of key techniques used extensively in the fabrication of structures at the nanoscale. The present work covers the essential technologies for creating sub 25 nm features lithographically, depositing layers with nanometer control, and etching patterns and structures at the nanoscale. A distinguishing feature of this book is a focus not on extension of microelectronics fabrication, but rather on techniques applicable for building NEMS, biosensors, nanomaterials, photonic crystals, and other novel devices and structures that will revolutionize society in the coming years.
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