This is an ex-library book and may have the usual library/used-book markings inside.This book has hardback covers. In good all round condition. No dust jacket. Please note the Image in this listing is a stock photo and may not match the covers of the actual item,1050grams, ISBN:9780198562832.

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Bibliographic Details

Title

Nanotechnology: Integrated Processing Systems for Ultra-Precision and Ultra-Fine Products

Publisher

Oxford University Press

Publication Date

1996

Language

English

ISBN 10

0198562837

ISBN 13

9780198562832

Binding

Hardcover

Condition

Good

Weight

1050 grams

Seller catalogs

Science & Technology

About this title

Synopsis

The manufacture of integrated circuits and opto-electronic devices, for example, calls for accuracies in the nanometer range (approximately three atomic lattice spacings). This book, written by leading researchers in Japan, examines the technology and systems needed to achieve this level of accuracy. The underlying concept of nanotechnology systems comes from the prediction that the extremely high accuracy required in materials processing will ultimately reach the order of 1nm (nanometer). Since the distance between lattice atoms is about 0.3nm, this constitutes the limit in resolution for measurable or confirmable lengths of solid materials. This leads directly to processing at the atomic bit level at which sub-nm resolution becomes necessary. Nanotechnology is concerned with integrated processing systems for measurement, position control, and processing technologies in the sub-nm range. It will be essential in the fabrication of extremely precise and fine parts.

About the Author

Norio Taniguchi is at Tokyo Science University. Tsuguo Kohno is at Tokyo Metropolitan Institute of Science and Technology. Maruyama is at Tokyo Institute of Technology.

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