New Approaches to Image Processing Based Failure Analysis of Nano-Scale ULSI Devices

Eran Gur

ISBN 10: 0323241433 / ISBN 13: 9780323241434

Published by Elsevier Science, 2013

About this Item

nach der Bestellung gedruckt Neuware - Printed after ordering - New Approaches to Image Processing Based Failure Analysis of Nano-Scale ULSI Devices introduces the reader to transmission and scanning microscope image processing for metal and non-metallic microstructures. Engineers and scientists face the pressing problem in ULSI development and quality assurance: microscopy methods can't keep pace with the continuous shrinking of feature size in microelectronics. Nanometer scale sizes are below the resolution of light, and imaging these features is nearly impossible even with electron microscopes, due to image noise. This book presents novel 'smart' image processing methods, applications, and case studies concerning quality improvement of microscope images of microelectronic chips and process optimization. It explains an approach for high-resolution imaging of advanced metallization for micro- and nanoelectronics. This approach obviates the time-consuming preparation and selection of microscope measurement and sample conditions, enabling not only better electron-microscopic resolution, but also more efficient testing and quality control. This in turn leads to productivity gains in design and development of nano-scale ULSI chips. The authors also present several approaches for super-resolving low-resolution images to improve failure analysis of microelectronic chips.

Seller Inventory # 9780323241434

Bibliographic Details

• Title: New Approaches to Image Processing Based Failure Analysis of Nano-Scale ULSI Devices
• Publisher: Elsevier Science
• Publication Date: 2013
• Language: English
• ISBN 10: 0323241433
• ISBN 13: 9780323241434
• Binding: Taschenbuch
• Condition: Neu
• Dimensions: 228W x 151H x 10D millimeters 228 millimeters width by 151 millimeters height by 10 millimeters depth
• Weight: 198 grams

About this title

Synopsis

New Approaches to Image Processing Based Failure Analysis of Nano-Scale ULSI Devices introduces the reader to transmission and scanning microscope image processing for metal and non-metallic microstructures.

Engineers and scientists face the pressing problem in ULSI development and quality assurance: microscopy methods can’t keep pace with the continuous shrinking of feature size in microelectronics. Nanometer scale sizes are below the resolution of light, and imaging these features is nearly impossible even with electron microscopes, due to image noise.

This book presents novel "smart" image processing methods, applications, and case studies concerning quality improvement of microscope images of microelectronic chips and process optimization. It explains an approach for high-resolution imaging of advanced metallization for micro- and nanoelectronics. This approach obviates the time-consuming preparation and selection of microscope measurement and sample conditions, enabling not only better electron-microscopic resolution, but also more efficient testing and quality control. This in turn leads to productivity gains in design and development of nano-scale ULSI chips.

The authors also present several approaches for super-resolving low-resolution images to improve failure analysis of microelectronic chips.

• Acquaints users with new software-based approaches to enhance high-resolution microscope imaging of microchip structures
• Demonstrates how these methods lead to productivity gains in the development of ULSI chips
• Presents several techniques for the superresolution of images, enabling engineers and scientists to improve their results in failure analysis of microelectronic chips