New Approaches to Image Processing Based Failure Analysis of Nano-Scale ULSI Devices

Language: English

Published by Elsevier Science, 2013

0323241433 / 9780323241434

Series: Book 55 of 393 - Micro and Nano Technologies

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nach der Bestellung gedruckt Neuware - Printed after ordering - New Approaches to Image Processing Based Failure Analysis of Nano-Scale ULSI Devices introduces the reader to transmission and scanning microscope image processing for metal and non-metallic microstructures. Engineers and scientists face the pressing problem in ULSI development and quality assurance: microscopy methods can't keep pace with the continuous shrinking of feature size in microelectronics. Nanometer scale sizes are below the resolution of light, and imaging these features is nearly impossible even with electron microscopes, due to image noise. This book presents novel 'smart' image processing methods, applications, and case studies concerning quality improvement of microscope images of microelectronic chips and process optimization. It explains an approach for high-resolution imaging of advanced metallization for micro- and nanoelectronics. This approach obviates the time-consuming preparation and selection of microscope measurement and sample conditions, enabling not only better electron-microscopic resolution, but also more efficient testing and quality control. This in turn leads to productivity gains in design and development of nano-scale ULSI chips. The authors also present several approaches for super-resolving low-resolution images to improve failure analysis of microelectronic chips.

Seller Inventory # 9780323241434

Title
New Approaches to Image Processing Based Failure Analysis of Nano-Scale ULSI Devices
Author
Eran Gur
Publisher
Elsevier Science
Publication year
2013
Condition
Neu
Binding
Taschenbuch
Language
English
ISBN 10
0323241433
ISBN 13
9780323241434
Item weight
198 grams
Dimensions
228x151x10 mm
Series
Book 55 of 393: Micro and Nano Technologies

AHA-BUCH GmbH

Einbeck, Germany

5-star seller

AbeBooks seller since August 14, 2006

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Item5 to 7 business days7 to 10 business days
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