Optical Imaging in Projection Microlithography (SPIE Tutorial Texts in Optical Engineering Vol. TT66)
Language: English
Published by SPIE Publications, 2005
- Softcover
- New

Seller: Kennys Bookshop and Art Galleries Ltd., Galway, GY, IrelandKennys Bookshop and Art Galleries Ltd.
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Condition: New
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An integrated mathematical view of the physics and numerical modeling of optical projection lithography that covers the full spectrum of the important concepts. Readers with a good working knowledge of calculus can follow the development, technologists can gather concepts and the equations that result. The casual reader will gain a perspective. Series: Tutorial Texts. Num Pages: 276 pages, Illustrations. BIC Classification: TJFC; TTB. Category: (P) Professional & Vocational; (UP) Postgraduate, Research & Scholarly. Dimension: 253 x 181 x 18. Weight in Grams: 662. . 2005. illustrated edition. Paperback. . . . .
Seller Inventory # V9780819458292
- Title
- Optical Imaging in Projection Microlithography (SPIE Tutorial Texts in Optical Engineering Vol. TT66)
- Author
- Alfred Kwok-Kit Wong
- Publisher
- SPIE Publications
- Publication year
- 2005
- Condition
- New
- Binding
- Soft cover
- Language
- English
- ISBN 10
- 0819458295
- ISBN 13
- 9780819458292
Contents
- Foreword
- Preface
- List of Symbols
- Basic Electromagnetism
- Elements of Geometrical Optics
- Elements of Diffraction Theory
- Imaging of Extended Objects with Finite Sources
- Resolution and Image Enhancement
- Oblique Rays
- Aberrations
- Numerical Computation
- Variabilities
- Appendix A: Birefringence
- Appendix B: Stationarity and Ergodicity
- Appendix C: Some Zernike Polynomials
- Appendix D: Simulator Accuracy Tests
- Appendix E: Select Refractive Indexes
- Appendix F: Assorted Theorems and Identities
- Bibliography
- Solutions to Exercises
- Index
"Synopsis" may belong to another edition of this title.
Kennys Bookshop and Art Galleries Ltd.
Galway, GY, Ireland
AbeBooks seller since February 27, 2001
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