An integrated mathematical view of the physics and numerical modeling of optical projection lithography that covers the full spectrum of the important concepts. Readers with a good working knowledge of calculus can follow the development, technologists can gather concepts and the equations that result. The casual reader will gain a perspective. Series: Tutorial Texts. Num Pages: 276 pages, Illustrations. BIC Classification: TJFC; TTB. Category: (P) Professional & Vocational; (UP) Postgraduate, Research & Scholarly. Dimension: 253 x 181 x 18. Weight in Grams: 662. . 2005. illustrated edition. Paperback. . . . . Books ship from the US and Ireland.

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Bibliographic Details

Title: Optical Imaging in Projection Microlithography (SPIE Tutorial Texts in Optical Engineering Vol. TT66)
Publisher: SPIE Publications
Publication Date: 2005
Language: English
ISBN 10: 0819458295
ISBN 13: 9780819458292
Binding: Soft cover
Condition: New

About this title

Synopsis

Here for the first time is an integrated mathematical view of the physics and numerical modeling of optical projection lithography that efficiently covers the full spectrum of the important concepts. Alfred Wong offers rigorous underpinning, clarity in systematic formulation, physical insight into emerging ideas, as well as a system level view of the parameter tolerances required in manufacturing. Readers with a good working knowledge of calculus can follow the step-by-step development, and technologists can gather general concepts and the key equations that result. Even the casual reader will gain a perspective on the key concepts, which will likely help facilitate dialog among technologists.

Contents

- Foreword
- Preface
- List of Symbols
- Basic Electromagnetism
- Elements of Geometrical Optics
- Elements of Diffraction Theory
- Imaging of Extended Objects with Finite Sources
- Resolution and Image Enhancement
- Oblique Rays
- Aberrations
- Numerical Computation
- Variabilities
- Appendix A: Birefringence
- Appendix B: Stationarity and Ergodicity
- Appendix C: Some Zernike Polynomials
- Appendix D: Simulator Accuracy Tests
- Appendix E: Select Refractive Indexes
- Appendix F: Assorted Theorems and Identities
- Bibliography
- Solutions to Exercises
- Index

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