Optical Materials: Microstructuring Surfaces with Off-Electrode Plasma

This reference book concentrates on microstructuring surfaces of optical materials with directed fluxes of off-electrode plasma generated by high-voltage gas discharge and developing methods and equipment related to this technique. It covers theoretical and experimental studies on the electrical and physical properties of high-voltage gas discharges used to generate plasma outside an electrode gap. A new class of methods and devices that makes it possible to implement a series of processes for fabricating diffraction microstructures on large format wafers is also discussed.

VSEVOLOD KOLPAKOV is a doctor of physics and mathematics and a professor in the Department of Electronic Engineering and Technology at the Samara National Research University (Samara State Aerospace University), Samara, Russia. He is an expert in ionplasma technology and quality management, the author and co-author of 120 scientific publications, including 3 monographs, 2 textbooks, and 40 articles, and a co-inventor of 9 patents.

NIKOLAY KAZANSKIY is head and acting director of the Diffractive Optics Laboratory at the Image Processing Systems Institute and a professor in the Technical Cybernetics Department at the Samara National Research University (Samara State Aerospace University), Samara, Russia. He is a member of SPIE and IAPR, the author and co-author of 240 articles and 10 monographs, and a co-inventor of 46 patents in diffractive optics, mathematical modelling, and nanophotonics.