Optimal Synthesis Methods for MEMS

. Ed(s): Ananthasuresh, S.G.K. (University of Pennsylvania, Philadelphia, USA)

ISBN 10: 1402076207 / ISBN 13: 9781402076206

Published by Kluwer Academic Publishers, 2003

Offers a collection of optimization-based synthesis methods for MEMS. This title covers a variety of MEMS devices and actuation principles including mechanical, electrostatic, electro-thermal, and piezoelectric. It also addresses process, mask, and system-level syntheses. It includes background material, algorithms, and details of implementation. Editor(s): Ananthasuresh, S.G.K. (University of Pennsylvania, Philadelphia, USA). Series: Microsystems. Num Pages: 320 pages, 187 black & white illustrations, biography. BIC Classification: TBD; THR; TJF. Category: (G) General (US: Trade); (P) Professional & Vocational; (U) Tertiary Education (US: College). Dimension: 234 x 156 x 20. Weight in Grams: 653. . 2003. Hardback. . . . . Seller Inventory # V9781402076206

Synopsis:

The field of "microelectromechanical systems," or "MEMS," has gradually evolved from a "discipline" populated by a small group of researchers to an "enabling technology" supporting a variety of products in such diverse areas as mechanical and inertial sensors, optical projection displays, telecommunications equipment, and biology and medicine. Critical to the success of these products is the ability to design them, and this invariably involves detailed modeling of proposed designs. Over the past twenty years, such modeling has become increasingly sophisticated, with full suites of MEMS-oriented computer-aided-design tools now available worldwide. But there is another equally important side to the design process ­ In my own book, Microsystem figuring out what to build in the first place. Design, I chose to emphasize the modeling aspect of design. The task of figuring out what to build was defined by a vague step called "creative thinking." I used practical product examples to illustrate the many subtle characteristics of successful designs, but I made no attempt to systematize the generation ofdesign proposals or optimized designs. That systemization is called "synthesis," which is the subjectofthis book.

Bibliographic Details

Title: Optimal Synthesis Methods for MEMS
Publisher: Kluwer Academic Publishers
Publication Date: 2003
Binding: Hardcover
Condition: New