PVD for Microelectronics: Sputter Desposition to Semiconductor Manufacturing

Language: English

Published by Elsevier Science & Technology, Academic Press, 1999

012533026X / 9780125330268

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Seller: AHA-BUCH GmbH, Einbeck, GermanyAHA-BUCH GmbH

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nach der Bestellung gedruckt Neuware - Printed after ordering - Physics of Thin Films is one of the longest running continuing series in thin film science, consisting of 25 volumes since 1963. The series contains quality studies of the properties of various thin films materials and systems.In order to be able to reflect the development of today's science and to cover all modern aspects of thin films, the series, starting with Volume 20, has moved beyond the basic physics of thin films. It now addresses the most important aspects of both inorganic and organic thin films, in both their theoretical as well as technological aspects. Therefore, in order to reflect the modern technology-oriented problems, the title has been slightly modified from Physics of Thin Films to Thin Films.This volume, part of the Thin Films Series, has been wholly written by two authors instead of showcasing several edited manuscripts.

Seller Inventory # 9780125330268

Title
PVD for Microelectronics: Sputter Desposition to Semiconductor Manufacturing
Author
Stephen M. Rossnagel
Publisher
Elsevier Science & Technology, Academic Press
Publication year
1999
Condition
Neu
Binding
Buch
Language
English
ISBN 10
012533026X
ISBN 13
9780125330268
Item weight
810 grams
Dimensions
229x152x23 mm

AHA-BUCH GmbH

Einbeck, Germany

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AbeBooks seller since August 14, 2006

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