Physics of Submicron Devices (Microdevices: Physics & Fabrication Technologies)

A compendium of otherwise scattered information on the physics involved in the construction and operation of semiconductor devices at the submicron level. Addressed to people who make such devices, and assumes a solid understanding of solid state physics and electronics, and at least a familiarity with quantum mechanics. In addition to an introductory review, the topics include fabrication techniques, heterojunctions and interfaces, transport models, alloys and superlattices, and noise. Annotation copyright Book News, Inc. Portland, Or.

David Ferry is Regents' Professor in the Department of Electrical Engineering at Arizona State University. His areas of research include nanoelectronic devices, quantum transport, and nonequilibrium transport. He is a Fellow of the American Physical Society, the Institute of Electrical and Electronics Engineers, and of the Institute of Physics (UK).