Plasma Polymerization Processes (Plasma Technology)

The aim of this book is to show how to make useful plasma polymerization processes resulting in polymeric (organic) materials - usually thin films of the desirable properties. The main emphasis is on the detailed discussion of the deposition apparatus, deposition parameters and properties of the obtained films.

The historical background and the processes related to plasma polymerization are discussed. Fundamentals of plasma physics and plasma chemistry are concisely reviewed and used as a base for the explanation of plasma polymerization principles and its models. Special attention is devoted to the real plasma polymerization reactors and various polymer film deposition arrangements. Many technical details are examined including the influence of process parameters on the properties of the resulting plasma polymers. New systems based on a microwave discharge are also described.

The properties of the most important plasma polymers - plasma polymerized organosilicons, halocarbons and composite metal/plasma polymers are reviewed. Finally, the applications of plasma polymers are presented, e.g. for passivation and protective coatings, lithography and optical beam recording, electrophotography, microelectronics, modifications of conventional polymer surfaces - biomedical uses, membranes, etc. Future prospects and developments in plasma polymerization e.g. for molecular electronics and other areas are also outlined.