Plasma Science and Technology

Tetsu Mieno

ISBN 10: 9535122800 / ISBN 13: 9789535122807

Published by Intechopen Apr 2016, 2016

About this Item

This item is printed on demand - it takes 3-4 days longer - Neuware -In the early twentieth century, Dr. Irving Langmuir actively studied plasma discharge and surface science. Since then, great progress has been made in the development of applications of discharges and plasmas such as discharge lamps, electric tubes, and arc welding. In relation to studies on space physics and controlled nuclear fusion, plasma physics has greatly advanced. Plasma chemistry has also progressed along with its applications in LSI fabrication technology, the chemical vapor deposition of functional films, and the production of nanomaterials. In the twenty-first century, the further development of applications of plasma physics and plasma chemistry is certainly expected. In this book, 18 chapters on the recent progress in plasma science and technology have been written by active specialists worldwide. 548 pp. Englisch.

Seller Inventory # 9789535122807

Bibliographic Details

• Title: Plasma Science and Technology
• Publisher: Intechopen Apr 2016
• Publication Date: 2016
• Language: English
• ISBN 10: 9535122800
• ISBN 13: 9789535122807
• Binding: Buch
• Condition: Neu
• Dimensions: 266W x 185H x 42D millimeters 266 millimeters width by 185 millimeters height by 42 millimeters depth
• Weight: 1387 grams

About this title

Synopsis

In the early twentieth century, Dr. Irving Langmuir actively studied plasma discharge and surface science. Since then, great progress has been made in the development of applications of discharges and plasmas such as discharge lamps, electric tubes, and arc welding. In relation to studies on space physics and controlled nuclear fusion, plasma physics has greatly advanced. Plasma chemistry has also progressed along with its applications in LSI fabrication technology, the chemical vapor deposition of functional films, and the production of nanomaterials. In the twenty-first century, the further development of applications of plasma physics and plasma chemistry is certainly expected. In this book, 18 chapters on the recent progress in plasma science and technology have been written by active specialists worldwide.