Title: Polymers in Microlithography: Materials and Processes (Acs Symposium Series)
Publisher: American Chemical Society
Publication Date: 1989
Language: English
ISBN 10: 0841217017
ISBN 13: 9780841217010
Binding: Hardcover
Condition: New

About this title

Synopsis

This volume examines the role polymeric materials play in the electronics industry, with special emphasis on recent advances in the science and technology of resist materials and processing for microlithography. It provides the reader with an appreciation for the diversity of chemical research efforts that are required for the development of new resist materials and processes. Its 26 chapters are divided into three sections covering chemically applied resist chemistry, multilevel resist chemistry and processing, and novel chemistry and processes for microlithography. Each section contains an introduction written by a recognized expert in the field.

About the Author

Elsa Reichmanis is at ATandT Bell Laboratories. Scott A. MacDonald is at Almaden Research Center.

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