Principles and Applications of NanoMEMS Physics presents the first unified exposition of the physical principles at the heart of NanoMEMS-based devices and applications. In particular, after beginning with a comprehensive presentation of the fundamentals and limitations of nanotechnology and MEMS fabrication techniques, the book addresses the physics germane to this dimensional regime, namely, quantum wave-particle phenomena, including, the manifestation of charge discreteness, quantized electrostatic actuation, and the Casimir effect, and quantum wave phenomena, including, quantized electrical conductance, quantum interference, Luttinger liquids, quantum entanglement, superconductivity and cavity quantum electrodynamics. Potential building blocks are also addressed for NanoMEMS applications, including, nanoelectromechanical quantum circuits and systems such as charge detectors, the which-path electron interferometer, and the Casimir oscillator, as well as a number of quantum computing implementation paradigms. Finally, NanoMEMS applications in photonics are addressed, including nanophotonic light sources and plasmonic devices.

About the Author

H�ctor J. De Los Santos is president and CTO of NanoMEMS Research LLC in Irvine, California. He is also the author of successful RF MEMS book that Artech House published. He is a respected person within the MEMS and NEMS community

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