Principles of Plasma Discharges and Materials Processing
Lieberman, Michael A.; Lichtenberg, Allan J.
Language: English
Published by Wiley-Interscience, 1994
- Hardcover
- Used
Condition: Used - Good
US$ 69.93
Quantity: 1 available
Add to basketItem description from seller
All pages and cover are intact including the dust cover, if applicable . Spine may show signs of wear. Pages may include limited notes and highlighting. May include "From the library of" labels. Shrink wrap, dust covers, or boxed set case may be missing. Item may be missing bundled media.
Seller Inventory # MINV.0471005770.G
- Title
- Principles of Plasma Discharges and Materials Processing
- Author
- Lieberman, Michael A.; Lichtenberg, Allan J.
- Publisher
- Wiley-Interscience
- Publication year
- 1994
- Condition
- good
- Binding
- Hardcover
- Language
- English
- ISBN 10
- 0471005770
- ISBN 13
- 9780471005773
- In-depth coverage of the fundamentals of plasma physics and chemistry—includes separate chapters on atomic and molecular collisions
- Applies basic theory to plasma discharges, including calculations of plasma parameters and scaling of plasma parameters with control parameters
- Applies results to basic processing mechanisms and the effects of plasma parameters on those mechanisms
- Uses numerous worked examples to demonstrate the relationships between control parameters, plasma parameters, and processing results
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About the Author
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