Process Modeling of Chemical Mechanical Planarization : An Integrated Model from Abrasive Scale to Chip Scale; Basics, Characterizations, Modeling and Verification

Language: English

Published by VDM Verlag Dr. Müller, VDM Verlag Dr. Müller E.K., 2008

3639001664 / 9783639001662

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Seller: AHA-BUCH GmbH, Einbeck, GermanyAHA-BUCH GmbH

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Softcover

Condition: New

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Item description from seller

Neuware - Chemical Mechanical Planarization (CMP) is one of the key enabling technologies for modern IC fabrication. However, mainly due to the high complexities coming from various interactions among mechanical reactions and chemical reactions, its fundamental working mechanism is still not fully understood. This book summarizes key CMP applications and challenges in modern IC fabrication, and provides a comprehensive physical CMP process model that can be applied for process characterization, process optimization, consumable development, and layout design for manufacturing (DFM). The model has been built from an abrasive scale to a chip scale, focusing on practical application for DFM while also considering CMP process conditions as key input parameters. Also included are examples of a computer model application for pattern dependent variation in shallow trench isolation CMP and the model verification with specially designed test chip. The model should help CMP professionals, DFM engineers and students of IC fabrication obtain a fundamental understanding of CMP process and characterize and improve a process through real application.…

Seller Inventory # 9783639001662

Title
Process Modeling of Chemical Mechanical Planarization : An Integrated Model from Abrasive Scale to Chip Scale; Basics, Characterizations, Modeling and Verification
Author
Jihong Choi
Publisher
VDM Verlag Dr. Müller, VDM Verlag Dr. Müller E.K.
Publication year
2008
Condition
Neu
Binding
Taschenbuch
Language
English
ISBN 10
3639001664
ISBN 13
9783639001662
Item weight
233 grams
Dimensions
220x150x9 mm

AHA-BUCH GmbH

Einbeck, Germany

5-star seller

AbeBooks seller since August 14, 2006

Shipping rates from Germany to U.S.A.

Item7 to 10 business days5 to 7 business days
First itemUS$ 39.05US$ 50.21
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