Resolution Enhancement Techniques in Optical Lithography (SPIE Tutorial Texts in Optical Engineering Vol. TT47)
Language: English
Published by SPIE Publications, 2001
- Softcover
- Used
Condition: Used - Fair
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- Title
- Resolution Enhancement Techniques in Optical Lithography (SPIE Tutorial Texts in Optical Engineering Vol. TT47)
- Author
- Alfred Kwok-Kit Wong
- Publisher
- SPIE Publications
- Publication year
- 2001
- Condition
- Acceptable
- Binding
- Paperback
- Language
- English
- ISBN 10
- 0819439959
- ISBN 13
- 9780819439956
Contents
- Foreword
- Preface
- List of symbols
- Introduction
- Optical imaging and resolution
- Modified illumination
- Optical proximity correction
- Alternating phase-shifting mask
- Attenuated phase-shift mask
- Selecting appropriate RETs
- Second-generation RETs
- Concluding remarks
- k1 conversion charts
- Bibliography
- Index
"Synopsis" may belong to another edition of this title.
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