Resolution Enhancement Techniques in Optical Lithography (SPIE Tutorial Texts in Optical Engineering Vol. TT47)
Language: English
Published by SPIE Publications, 2001
- Softcover
- Used

Seller: The Book Corner, Beaverton, OR, U.S.A.The Book Corner
AbeBooks seller since March 8, 2017
Condition: Used - Fair
US$ 36.25
Quantity: 1 available
Add to basketItem description from seller
Paperback. Cover and first half of book's pages are curled and worn on bottom right. Spine in good condition. Spine is tight. Pages are clean, no markings, notes or stains. Ships from Friends bookstore to benefit Beaverton (Oregon) library.
Seller Inventory # mon0000082278
- Title
- Resolution Enhancement Techniques in Optical Lithography (SPIE Tutorial Texts in Optical Engineering Vol. TT47)
- Author
- Alfred Kwok-Kit Wong
- Publisher
- SPIE Publications
- Publication year
- 2001
- Condition
- Acceptable
- Binding
- paperback
- Language
- English
- ISBN 10
- 0819439959
- ISBN 13
- 9780819439956
Contents
- Foreword
- Preface
- List of symbols
- Introduction
- Optical imaging and resolution
- Modified illumination
- Optical proximity correction
- Alternating phase-shifting mask
- Attenuated phase-shift mask
- Selecting appropriate RETs
- Second-generation RETs
- Concluding remarks
- k1 conversion charts
- Bibliography
- Index
"Synopsis" may belong to another edition of this title.
The Book Corner
Beaverton, OR, U.S.A.
AbeBooks seller since March 8, 2017
Shipping rates within U.S.A.
| Item | 5 to 14 business days | 3 to 6 business days |
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| First item | US$ 5.00 | US$ 10.50 |
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Store description
The Book Corner is a used book store operated by the Friends of the Beaverton Library. The Friends group is a nonprofit organization that donates the proceeds of book sales to supplement programs and materials for the two libraries in the Beaverton (Oregon) area.
Seller's business information
New Friends of the Beaverton City Library
12470 SW 5th Street
Beaverton, OR U.S.A. 97005
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