Run-To-Run Control in Semiconductor Manufacturing

Language: English

Published by CRC Press Nov 2000, 2000

0849311780 / 9780849311789

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Seller: AHA-BUCH GmbH, Einbeck, GermanyAHA-BUCH GmbH

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Neuware - Run-to-run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine 'runs,' thereby minimizing process drift, shift, and variability-and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run to Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control.

Seller Inventory # 9780849311789

Title
Run-To-Run Control in Semiconductor Manufacturing
Author
Enrique Del Castillo
Publisher
CRC Press Nov 2000
Publication year
2000
Condition
Neu
Binding
Buch
Language
English
ISBN 10
0849311780
ISBN 13
9780849311789
Item weight
617 grams
Dimensions
242x161x22 mm

AHA-BUCH GmbH

Einbeck, Germany

5-star seller

AbeBooks seller since August 14, 2006

Shipping rates from Germany to U.S.A.

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