Neuware - Run-to-Run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine 'runs,' thereby minimizing process drift, shift, and variability and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run-to-Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control. TOC:Introduction.- What is Run-to-Run Control - Target Audience.- Purpose of this Book.- Outline.- Background.- History of the Development of Run-to-Run Control.- Developing a Run-to-Run Solution.- Developing and Deploying Run-to-Run Solutions: Integrating Control.- Run-to-Run Solution Conclusions.- Summary of Run-to-Run Development and Deployment Process.- Deploying Run-to-Run Control in a Timely and Cost Effective Manner.- Overcoming Barriers to Deployment.- Future Research and Development Issues.- References.

Seller Inventory # 9780849311789

Contact seller

Report this item

Bibliographic Details

Title: Run-To-Run Control in Semiconductor Manufacturing
Publisher: CRC Press Nov 2000
Publication Date: 2000
Language: English
ISBN 10: 0849311780
ISBN 13: 9780849311789
Binding: Buch
Condition: Neu
Dimensions: 242 millimeters width by 161 millimeters height by 22 millimeters depth
Weight: 617 grams

About this title

Synopsis

Run-to-run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine "runs," thereby minimizing process drift, shift, and variability-and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run to Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control.

About the Author

James Moyne, Enrique del Castillo, Arnon M. Hurwitz

"About this title" may belong to another edition of this title.

Store Description

Das Unternehmen AHA-BUCH GmbH: Seit der Gr�ndung von AHA-BUCH im Juli 2005 ist unser Hauptziel, zufriedenen Kunden so schnell und so preisg�nstig wie m�glich ihren B�cherwunsch zu erf�llen. Unsere Firma besch�ftigt 16 Mitarbeiter, die nur ein Ziel kennen: den Kunden und seine W�nsche! Auf �ber 3700 m2 Fl�che haben wir �ber 100.000 B�cher, Modernes Antiquariat und Spiele auf Lager.

Visit Seller's Storefront

Seller's business information

AHA-BUCH GmbH
Garlebsen 48, Einbeck, 37574, Germany

Sale & Shipping Terms

Terms of Sale

General Terms and Conditions and Customer Information / Privacy Policy

I. General Terms and Conditions

� 1 Basic provisions

(1) The following terms and conditions apply to all contracts that you conclude with us as a provider (AHA-BUCH GmbH) via the Internet platforms AbeBooks and/or ZVAB. Unless otherwise agreed, the inclusion of any of your own terms and conditions used by you will be objected to

(2) A consumer within the meaning of the following regulations is any natural person who concludes...

More Information

Shipping Terms

We ship your order after we received them
for articles on hand latest 24 hours,
for articles with overnight supply latest 48 hours.
In case we need to order an article from our supplier our dispatch time depends on the reception date of the articles, but the articles will be shipped on the same day.

Our goal is to send the ordered articles in the fastest, but also most efficient and secure way to our customers.

Shipping rates from Germany to U.S.A.

Shipping rates from Germany to U.S.A.
Order quantity	30 to 40 business days	7 to 14 business days
First item	US$ 73.07	US$ 84.65

Delivery times are set by sellers and vary by carrier and location. Orders passing through Customs may face delays and buyers are responsible for any associated duties or fees. Sellers may contact you regarding additional charges to cover any increased costs to ship your items.