Run-to-Run Control in Semiconductor Manufacturing

Boning, Duane S. Ed(s): Moyne, James; del Castillo, Enrique; Hurwitz, A.M.

ISBN 10: 0849311780 / ISBN 13: 9780849311789

Published by CRC Press, 2000

About this Item

Offers analyses of run-to-run (R2R) control. Through manufacturing case studies, this book provides justification for and demonstrates the benefits of run-to-run control, and offers the know-how and direction for incorporating R2R control into readers' manufacturing capabilities. Editor(s): Moyne, James; del Castillo, Enrique; Hurwitz, A.M. Num Pages: 368 pages, 27 black & white tables. BIC Classification: TGP; TJFD5. Category: (P) Professional & Vocational. Dimension: 242 x 158 x 22. Weight in Grams: 630. . 2000. 1st Edition. hardcover. . . . . Books ship from the US and Ireland.

Seller Inventory # V9780849311789

Bibliographic Details

• Title: Run-to-Run Control in Semiconductor Manufacturing
• Publisher: CRC Press
• Publication Date: 2000
• Language: English
• ISBN 10: 0849311780
• ISBN 13: 9780849311789
• Binding: Hardcover
• Condition: New

About this title

Synopsis

Run-to-run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine "runs," thereby minimizing process drift, shift, and variability-and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run to Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control.

About the Author

James Moyne, Enrique del Castillo, Arnon M. Hurwitz