Scanning Electron Microscopy and X-Ray Microanalysis: A Text for Biologists, Materials Scientists, and Geologists

Goldstein, Joseph; Newbury, Dale E.; Echlin, Patrick

ISBN 10: 1461332745 / ISBN 13: 9781461332749

Published by Springer, 2013

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Bibliographic Details

• Title: Scanning Electron Microscopy and X-Ray Microanalysis: A Text for Biologists, Materials Scientists, and Geologists
• Publisher: Springer
• Publication Date: 2013
• Language: English
• ISBN 10: 1461332745
• ISBN 13: 9781461332749
• Binding: Soft cover
• Condition: New

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Synopsis

1. Introduction.- 1.1. Evolution of the Scanning Electron Microscope.- 1.2. Evolution of the Electron Probe Microanalyzer.- 1.3. Outline of This Book.- 2. Electron Optics.- 2.1. Electron Guns.- 2.1.1. Thermionic Emission.- 2.1.2. Tungsten Cathode.- 2.1.3. The Lanthanum Hexaboride (LaB6) Cathode.- 2.1.4. Field Emission Gun.- 2.2. Electron Lenses.- 2.2.1. General Properties of Magnetic Lenses.- 2.2.2. Production of Minimum Spot Size.- 2.2.3. Aberrations in the Electron Optical Column.- 2.3. Electron Probe Diameter, dp, vs. Electron Probe Current i.- 2.3.1. Calculation of dmin and imax.- 2.3.2. Measurement of Microscope Parameters (dp, i, ?).- 2.3.3. High-Resolution Scanning Electron Microscopy.- 3. Electron-Beam-Specimen Interactions.- 3.1. Introduction.- 3.2. Scattering.- 3.2.1. Elastic Scattering.- 3.2.2. Inelastic Scattering.- 3.3. Interaction Volume.- 3.3.1. Experimental Evidence.- 3.3.2. Monte Carlo Calculations.- 3.4. Backscattered Electrons.- 3.4.1. Atomic Number Dependence.- 3.4.2. Energy Dependence.- 3.4.3. Tilt Dependence.- 3.4.4. Angular Distribution.- 3.4.5. Energy Distribution.- 3.4.6. Spatial Distribution.- 3.4.7. Sampling Depth.- 3.5. Signals from Inelastic Scattering.- 3.5.1. Secondary Electrons.- 3.5.2. X-Rays.- 3.5.3. Auger Electrons.- 3.5.4. Cathodoluminescence.- 3.6. Summary.- 4. Image Formation in the Scanning Electron Microscope.- 4.1. Introduction.- 4.2. The Basic SEM Imaging Process.- 4.2.1. Scanning Action.- 4.2.2. Image Construction (Mapping).- 4.2.3. Magnification.- 4.2.4. Picture Element (Picture Point).- 4.2.5. Depth of Field.- 4.2.6. Image Distortions.- 4.3. Stereomicroscopy.- 4.4. Detectors.- 4.4.1. Electron Detectors.- 4.4.2. Cathodoluminescence Detectors.- 4.5. The Roles of Specimen and Detector in Contrast Formation.- 4.5.1. Contrast.- 4.5.2. Atomic Number (Compositional) Contrast (Backscattered Electron Signal).- 4.5.3. Compositional Contrast (Secondary-Electron Signal).- 4.5.4. Contrast Components.- 4.5.5. Topographic Contrast.- 4.6. Image Quality.- 4.6.1. Signal Quality and Contrast Information.- 4.6.2. Strategy in SEM Imaging.- 4.6.3. Resolution Limitations.- 4.7. Signal Processing for the Display of Contrast Information.- 4.7.1. The Visibility Problem.- 4.7.2. Signal Processing Techniques.- 4.7.3. Combinations of Detectors.- 4.7.4. Beam Energy Effects.- 4.7.5. Summary.- 5. X-Ray Spectral Measurement: WDS and EDS.- 5.1. Introduction.- 5.2. Wavelength-Dispersive Spectrometer.- 5.2.1. Basic Design.- 5.2.2. The X-Ray Detector.- 5.2.3. Detector Electronics.- 5.3. Energy-Dispersive X-Ray Spectrometer.- 5.3.1. Operating Principles.- 5.3.2. The Detection Process.- 5.3.3. Artifacts of the Detection Process.- 5.3.4. The Main Amplifier and Pulse Pileup Rejection.- 5.3.5. Artifacts from the Detector Environment.- 5.3.6. The Multichannel Analyzer.- 5.3.7. Summary of EDS Operation and Artifacts.- 5.4. Comparison of Wavelength-Dispersive Spectrometers with Energy-Dispersive Spectrometers.- 5.4.1. Geometrical Collection Efficiency.- 5.4.2. Quantum Efficiency.- 5.4.3. Resolution.- 5.4.4. Spectral Acceptance Range.- 5.4.5. Maximum Count Rate.- 5.4.6. Minimum Probe Size.- 5.4.7. Speed of Analysis.- 5.4.8. Spectral Artifacts.- Appendix: Initial Detector Setup and Testing.- 6. Qualitative X-Ray Analysis.- 6.1. Introduction.- 6.2. EDS Qualitative Analysis.- 6.2.1. X-Ray Lines.- 6.2.2. Guidelines for EDS Qualitative Analysis.- 6.2.3. Pathological Overlaps in EDS Qualitative Analysis.- 6.2.4. Examples of EDS Qualitative Analysis.- 6.3. WDS Qualitative Analysis.- 6.3.1. Measurement of X-Ray Lines.- 6.3.2. Guidelines for WDS Qualitative Analysis.- 6.4. X-Ray Scanning.- 7. Quantitative X-Ray Microanalysis.- 7.1. Introduction.- 7.2. ZAF Technique.- 7.2.1. Introduction.- 7.2.2. The Absorption Factor, A.- 7.2.3. The Atomic Number Factor, Z.- 7.2.4. The Characteristic Fluorescence Correction, F.- 7.2.5. The Continuum Fluorescence Correction.- 7.2.6. Summary Discussion of the ZAF Method.- 7.3. The Empirical Method.- 7.4.