Science and Technology of Chemical Mechanical Planarization (CMP): Volume 1157: Symposium Held April 14-16, 2009, San Francisco, California, U.s.a. (MRS Proceedings)

Edited by Ashok Kumar , C. Fred Higgs, III , Chad S. Korach , Subramanian Balakumar

ISBN 10: 1605111309 / ISBN 13: 9781605111308

Published by Cambridge University Press, 2010

About this Item

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners. Editor(s): Kumar, Ashok; Higgs, C. Fred; Korach, Chad; Balakumar, Subramanian. Series: MRS Proceedings. Num Pages: 165 pages, Illustrations. BIC Classification: TGM. Category: (U) Tertiary Education (US: College). Dimension: 228 x 152 x 15. Weight in Grams: 364. . 2010. Illustrated. hardcover. . . . . Books ship from the US and Ireland.

Seller Inventory # V9781605111308

Bibliographic Details

• Title: Science and Technology of Chemical Mechanical Planarization (CMP): Volume 1157: Symposium Held April 14-16, 2009, San Francisco, California, U.s.a. (MRS Proceedings)
• Publisher: Cambridge University Press
• Publication Date: 2010
• Language: English
• ISBN 10: 1605111309
• ISBN 13: 9781605111308
• Binding: Hardcover
• Condition: New

About this title

Synopsis

This book demonstrates the swift progress achieved in the field of diamond for electronic and bioelectronic applications. Predicted to become the 'ultimate semiconductor' in the early 1990s, diamond initially failed to match the impressive developments made with other wide-bandgap semiconductors. The situation is changing, with single-crystal electronic-grade diamond becoming a commercially available material. As importantly, the spectacular properties of single-point defects in diamond, as well as its superlative thermal conductivity, radiation 'hardness' and inherent biocompatibility, are being recognized as vital for devices used in biosensing, quantum informatics, and environmentally challenging applications. Not all recent advances relate to single-crystal diamond. Nanocrystalline diamond (NCD), ultra-nanocrystalline diamond (UNCD) and diamond-like carbon (DLC) are very important forms of carbon, as are multiphase carbon nanostructures and graphene. It features results in all areas of high-performance diamond research. Chemical, electrochemical, and biochemical sensing, including nanodiamond for sensing in-cellular environment and the integration of diamond within biological systems are highlighted.